HOME        LOGIN        JOIN   논문명 Enhancement of barrier properties of aluminum oxide layer by optimization of plasma-enhanced atomic layer deposition process 학술지명 Thin Solid Films 논문저자 Jong Geol Lee, Hyun Gi Kim, Sung Soo Kim 논문구분 논문 논문번호 vol.534, 515-519 게재년월 2013 첨부파일