HOME        LOGIN        JOIN   논문명 Defect-sealing of Al2O3/ZrO2 multilayer for barrier coating by plasma-enhanced atomic layer deposition process 학술지명 Thin Solid Films 논문저자 Jong Geol Lee, Hyun Gi Kim, Sung Soo Kim 논문구분 논문 논문번호 vol.577, 143-148 게재년월 2015 첨부파일